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1 Ergebnisse
1
Ultrafast Source Mask Optimization via Conditional Discrete..:
Chen, Guojin
;
Wang, Zixiao
;
Yu, Bei
..
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems. 43 (2024) 7 - p. 2140-2150 , 2024
Link:
https://doi.org/10.1109/tcad.2024.3361400
RT Journal T1 <Title>Ultrafast Source Mask Optimization via Conditional Discrete Diffusion</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tcad.2024.3361400&Exemplar=1&LAN=DE A1 Chen, Guojin A1 Wang, Zixiao A1 Yu, Bei A1 Pan, David Z. A1 Wong, Martin D. F. PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0278-0070 SN 1937-4151 JF IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems VO 43 IS 7 SP 2140 OP 2150 LK http://dx.doi.org/https://doi.org/10.1109/tcad.2024.3361400 DO https://doi.org/10.1109/tcad.2024.3361400 SF ELIB - SuUB Bremen
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