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Fabrication and Performance of 300-mm Wafer-Scale Silicon M..:

Colgan, Evan G. ; Schleupen, Kai ; Mann, Phillip...
IEEE Transactions on Components, Packaging and Manufacturing Technology.  13 (2023)  4 - p. 472-480 , 2023
Link: https://doi.org/10.1109/tcpmt.2023.3266666