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Effects of Sputtering Bias on the Material Characteristics ..:
Chuang, Tung-Han
;
Chen, Yen-Ting
;
Lai, Yu-Chang
.
IEEE Transactions on Components, Packaging and Manufacturing Technology. 13 (2023) 5 - p. 750-756 , 2023
Link:
https://doi.org/10.1109/tcpmt.2023.3277513
RT Journal T1 <Title>Effects of Sputtering Bias on the Material Characteristics of Ag Nanotwinned Films</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tcpmt.2023.3277513&Exemplar=1&LAN=DE A1 Chuang, Tung-Han A1 Chen, Yen-Ting A1 Lai, Yu-Chang A1 Yang, Zi-Hong PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 2156-3950 SN 2156-3985 JF IEEE Transactions on Components, Packaging and Manufacturing Technology VO 13 IS 5 SP 750 OP 756 LK http://dx.doi.org/https://doi.org/10.1109/tcpmt.2023.3277513 DO https://doi.org/10.1109/tcpmt.2023.3277513 SF ELIB - SuUB Bremen
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