I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Localized Backside Etching Structure of SOI Substrates on T..:

Zhao, Biyao ; Bi, Jinshun ; Ma, Yue...
IEEE Transactions on Electron Devices.  69 (2022)  5 - p. 2256-2261 , 2022
Link: https://doi.org/10.1109/ted.2022.3162171