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1 Ergebnisse
1
Physics-Based Model for Understanding Electromigration-Indu..:
Wang, Shizhao
;
Cheng, Chunmin
;
Liu, Tianjian
...
IEEE Transactions on Electron Devices. 69 (2022) 9 - p. 5123-5129 , 2022
Link:
https://doi.org/10.1109/ted.2022.3193014
RT Journal T1
Physics-Based Model for Understanding Electromigration-Induced Cavity Evolution in Advanced Narrow Line Copper Interconnects
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_ted.2022.3193014&Exemplar=1&LAN=DE A1 Wang, Shizhao A1 Cheng, Chunmin A1 Liu, Tianjian A1 Zhang, Hehui A1 Xue, Lianghao A1 Sun, Yameng A1 Han, Xu A1 Liu, Sheng PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 0018-9383 SN 1557-9646 JF IEEE Transactions on Electron Devices VO 69 IS 9 SP 5123 OP 5129 LK http://dx.doi.org/https://doi.org/10.1109/ted.2022.3193014 DO https://doi.org/10.1109/ted.2022.3193014 SF ELIB - SuUB Bremen
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