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1 Ergebnisse
1
The Effects of Postdeposition Anneal and Postmetallization ..:
Li, Yuanbiao
;
Tang, Xinyi
;
Xu, Guangwei
...
IEEE Transactions on Electron Devices. 70 (2023) 1 - p. 59-64 , 2023
Link:
https://doi.org/10.1109/ted.2022.3223327
RT Journal T1 <Title>The Effects of Postdeposition Anneal and Postmetallization Anneal on Electrical Properties of TiN/ZrO2/TiN Capacitors</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_ted.2022.3223327&Exemplar=1&LAN=DE A1 Li, Yuanbiao A1 Tang, Xinyi A1 Xu, Guangwei A1 Li, Haoxin A1 He, Song A1 Hu, Xianqin A1 Su, Xingsong A1 Bai, Weiping A1 Lu, Di A1 Long, Shibing PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 0018-9383 SN 1557-9646 JF IEEE Transactions on Electron Devices VO 70 IS 1 SP 59 OP 64 LK http://dx.doi.org/https://doi.org/10.1109/ted.2022.3223327 DO https://doi.org/10.1109/ted.2022.3223327 SF ELIB - SuUB Bremen
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