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1 Ergebnisse
1
Transient Thermal and Electrical Co-Optimization of BEOL To..:
Liao, Pai-Ying
;
Zheng, Dongqi
;
Alajlouni, Sami
...
IEEE Transactions on Electron Devices. 70 (2023) 4 - p. 2052-2058 , 2023
Link:
https://doi.org/10.1109/ted.2023.3235313
RT Journal T1
Transient Thermal and Electrical Co-Optimization of BEOL Top-Gated ALD In2O3 FETs Toward Monolithic 3-D Integration
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_ted.2023.3235313&Exemplar=1&LAN=DE A1 Liao, Pai-Ying A1 Zheng, Dongqi A1 Alajlouni, Sami A1 Zhang, Zhuocheng A1 Si, Mengwei A1 Zhang, Jie A1 Lin, Jian-Yu A1 Feygelson, Tatyana I. A1 Tadjer, Marko J. A1 Shakouri, Ali A1 Ye, Peide D. PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 0018-9383 SN 1557-9646 JF IEEE Transactions on Electron Devices VO 70 IS 4 SP 2052 OP 2058 LK http://dx.doi.org/https://doi.org/10.1109/ted.2023.3235313 DO https://doi.org/10.1109/ted.2023.3235313 SF ELIB - SuUB Bremen
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