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Vertical N-Type and P-Type Nanosheet FETs With C-Shaped Cha..:

Xiao, Z. R. ; Zhu, H. L. ; Wang, Q....
IEEE Transactions on Electron Devices.  70 (2023)  3 - p. 1380-1385 , 2023
Link: https://doi.org/10.1109/ted.2023.3239048