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200-mm Si CMOS Process-Compatible Integrated Passive Device..:

Park, Minsik ; Song, Jonghyun ; Jeong, Jaeyong...
IEEE Transactions on Electron Devices.  70 (2023)  10 - p. 5257-5264 , 2023
Link: https://doi.org/10.1109/ted.2023.3302817