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1 Ergebnisse
1
A MEMS Thermopile Pirani Sensor Integrated With Composite N..:
Xu, Shaohang
;
Shi, Meng
;
Huang, Ruoyang
...
IEEE Transactions on Electron Devices. 70 (2023) 10 - p. 5300-5305 , 2023
Link:
https://doi.org/10.1109/ted.2023.3306318
RT Journal T1 <Title>A MEMS Thermopile Pirani Sensor Integrated With Composite Nanoforests for Vacuum Monitoring in Semiconductor Equipment</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_ted.2023.3306318&Exemplar=1&LAN=DE A1 Xu, Shaohang A1 Shi, Meng A1 Huang, Ruoyang A1 Zhang, Chenchen A1 Li, Shaojuan A1 Huang, Chengjun A1 Zhou, Na A1 Mao, Haiyang PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 0018-9383 SN 1557-9646 JF IEEE Transactions on Electron Devices VO 70 IS 10 SP 5300 OP 5305 LK http://dx.doi.org/https://doi.org/10.1109/ted.2023.3306318 DO https://doi.org/10.1109/ted.2023.3306318 SF ELIB - SuUB Bremen
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