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1 Ergebnisse
1
Grain Size Reduction of Ferroelectric HZO Enabled by Solid ..:
Zhang, Dong
;
Wu, Jixuan
;
Kong, Qiwen
...
IEEE Transactions on Electron Devices. 70 (2023) 12 - p. 6665-6672 , 2023
Link:
https://doi.org/10.1109/ted.2023.3317007
RT Journal T1 <Title>Grain Size Reduction of Ferroelectric HZO Enabled by Solid Phase Epitaxy (SPE): Working Principle, Experimental Demonstration, and Theoretical Understanding</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_ted.2023.3317007&Exemplar=1&LAN=DE A1 Zhang, Dong A1 Wu, Jixuan A1 Kong, Qiwen A1 Zheng, Zijie A1 Zhou, Zuopu A1 Liu, Long A1 Han, Kaizhen A1 Sun, Chen A1 Wang, Xiaolin A1 Liu, Gan A1 Jiao, Leming A1 Kang, Yuye A1 Zheng, Gerui A1 Chen, Jiezhi A1 Gong, Xiao PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 0018-9383 SN 1557-9646 JF IEEE Transactions on Electron Devices VO 70 IS 12 SP 6665 OP 6672 LK http://dx.doi.org/https://doi.org/10.1109/ted.2023.3317007 DO https://doi.org/10.1109/ted.2023.3317007 SF ELIB - SuUB Bremen
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