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1 Ergebnisse
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Novel Scheme of Inner Spacer Length Optimization for Sub-3-..:
Lee, Sanguk
;
Jeong, Jinsu
;
Lee, Seunghwan
...
IEEE Transactions on Electron Devices. 70 (2023) 12 - p. 6151-6156 , 2023
Link:
https://doi.org/10.1109/ted.2023.3326789
RT Journal T1 <Title>Novel Scheme of Inner Spacer Length Optimization for Sub-3-nm Node Silicon n/p Nanosheet Field-Effect Transistors</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_ted.2023.3326789&Exemplar=1&LAN=DE A1 Lee, Sanguk A1 Jeong, Jinsu A1 Lee, Seunghwan A1 Lee, Junjong A1 Lim, Jaewan A1 Ahn, Yonghwan A1 Baek, Rock-Hyun PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 0018-9383 SN 1557-9646 JF IEEE Transactions on Electron Devices VO 70 IS 12 SP 6151 OP 6156 LK http://dx.doi.org/https://doi.org/10.1109/ted.2023.3326789 DO https://doi.org/10.1109/ted.2023.3326789 SF ELIB - SuUB Bremen
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