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1 Ergebnisse
1
A Wafer-Level Vacuum-Packaged Vertical Resonant Electric Fi..:
Gao, Yahao
;
Liu, Xiangming
;
Peng, Simin
...
IEEE Transactions on Electron Devices. 71 (2024) 1 - p. 782-789 , 2024
Link:
https://doi.org/10.1109/ted.2023.3331335
RT Journal T1 <Title>A Wafer-Level Vacuum-Packaged Vertical Resonant Electric Field Microsensor</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_ted.2023.3331335&Exemplar=1&LAN=DE A1 Gao, Yahao A1 Liu, Xiangming A1 Peng, Simin A1 Zhang, Wei A1 Liu, Yufei A1 Wang, Yao A1 Wu, Zhengwei A1 Peng, Chunrong A1 Xia, Shanhong PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0018-9383 SN 1557-9646 JF IEEE Transactions on Electron Devices VO 71 IS 1 SP 782 OP 789 LK http://dx.doi.org/https://doi.org/10.1109/ted.2023.3331335 DO https://doi.org/10.1109/ted.2023.3331335 SF ELIB - SuUB Bremen
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