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1 Ergebnisse
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Sub-5-Å La2O3 In Situ Dipole Technique for Large VFB Modula..:
Wei, Yanzhao
;
Yao, Jiaxin
;
Zhang, Qingzhu
...
IEEE Transactions on Electron Devices. 71 (2024) 1 - p. 746-751 , 2024
Link:
https://doi.org/10.1109/ted.2023.3335900
RT Journal T1 <Title>Sub-5-Å La2O3 In Situ Dipole Technique for Large VFB Modulation With EOT Reduction and Improved Interface for HKMG Technology</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_ted.2023.3335900&Exemplar=1&LAN=DE A1 Wei, Yanzhao A1 Yao, Jiaxin A1 Zhang, Qingzhu A1 Sang, Guanqiao A1 Bao, Yunjiao A1 Gao, Jianfeng A1 Li, Junfeng A1 Luo, Jun A1 Yin, Huaxiang PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0018-9383 SN 1557-9646 JF IEEE Transactions on Electron Devices VO 71 IS 1 SP 746 OP 751 LK http://dx.doi.org/https://doi.org/10.1109/ted.2023.3335900 DO https://doi.org/10.1109/ted.2023.3335900 SF ELIB - SuUB Bremen
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