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1 Ergebnisse
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A MEMS Friction Gauge For High Vacuum Measurement:
Wang, Chengxiang
;
Zhang, Huzhong
;
Hou, Zhanqiang
...
IEEE Transactions on Electron Devices. 71 (2024) 2 - p. 1231-1237 , 2024
Link:
https://doi.org/10.1109/ted.2023.3347382
RT Journal T1 <Title>A MEMS Friction Gauge For High Vacuum Measurement</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_ted.2023.3347382&Exemplar=1&LAN=DE A1 Wang, Chengxiang A1 Zhang, Huzhong A1 Hou, Zhanqiang A1 Li, Qingsong A1 Wu, Yulie A1 Wu, Xuezhong A1 Xiao, Dingbang PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0018-9383 SN 1557-9646 JF IEEE Transactions on Electron Devices VO 71 IS 2 SP 1231 OP 1237 LK http://dx.doi.org/https://doi.org/10.1109/ted.2023.3347382 DO https://doi.org/10.1109/ted.2023.3347382 SF ELIB - SuUB Bremen
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