I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
High-Performance HfO2/Al2O3 Superlattice MIM Capacitor in a..:
Mukhopadhyay, Partha
;
Fletcher, Ivan
;
Couvertier, Zuriel C.
...
IEEE Transactions on Electron Devices. 71 (2024) 3 - p. 2036-2042 , 2024
Link:
https://doi.org/10.1109/ted.2024.3353702
RT Journal T1
High-Performance HfO2/Al2O3 Superlattice MIM Capacitor in a 200 mm High-Volume Batch-ALD Platform
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_ted.2024.3353702&Exemplar=1&LAN=DE A1 Mukhopadhyay, Partha A1 Fletcher, Ivan A1 Couvertier, Zuriel C. A1 Morris, Julio A1 Perez, Jennifer A1 Nichols, Chris A1 Allgair, John A1 Vandevere, Jim A1 Schoenfeld, Winston V. A1 Aoki, Sara A1 Novoselic, Enzo A1 Lombardo, Shara A1 Triyoso, Dina A1 Kretzschmar, Jon A1 deVilliers, Anton A1 Fulford, Jim PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0018-9383 SN 1557-9646 JF IEEE Transactions on Electron Devices VO 71 IS 3 SP 2036 OP 2042 LK http://dx.doi.org/https://doi.org/10.1109/ted.2024.3353702 DO https://doi.org/10.1109/ted.2024.3353702 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)