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1 Ergebnisse
1
Preparation of Large Grain Size Polysilicon Using Long-Puls..:
Liu, Jinbiao
;
Mao, Shujuan
;
Xu, Jing
...
IEEE Transactions on Electron Devices. 71 (2024) 3 - p. 1957-1962 , 2024
Link:
https://doi.org/10.1109/ted.2024.3360017
RT Journal T1 <Title>Preparation of Large Grain Size Polysilicon Using Long-Pulse Green Laser Annealing for 3-D Integration Technology</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_ted.2024.3360017&Exemplar=1&LAN=DE A1 Liu, Jinbiao A1 Mao, Shujuan A1 Xu, Jing A1 Chen, Zhuo A1 Bai, Guobin A1 He, Xiaobin A1 Xiong, Wenjuan A1 He, Yanping A1 Yu, Jiahan A1 Li, Junfeng A1 Sun, Xianglie A1 Wang, Guilei A1 Zhao, Chao A1 Luo, Jun PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0018-9383 SN 1557-9646 JF IEEE Transactions on Electron Devices VO 71 IS 3 SP 1957 OP 1962 LK http://dx.doi.org/https://doi.org/10.1109/ted.2024.3360017 DO https://doi.org/10.1109/ted.2024.3360017 SF ELIB - SuUB Bremen
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