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1 Ergebnisse
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Highly Scaled BEOL-Compatible Thin Film Transistors With Ul..:
Liang, Yan-Kui
;
Zheng, Jun-Yang
;
Lin, Yu-Lon
...
IEEE Transactions on Electron Devices. 71 (2024) 6 - p. 3671-3677 , 2024
Link:
https://doi.org/10.1109/ted.2024.3385395
RT Journal T1 <Title>Highly Scaled BEOL-Compatible Thin Film Transistors With Ultrathin Atomic Layer Deposited Indium–Tin–Zinc–Oxide Channel</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_ted.2024.3385395&Exemplar=1&LAN=DE A1 Liang, Yan-Kui A1 Zheng, Jun-Yang A1 Lin, Yu-Lon A1 Lu, Yu-Cheng A1 Hsieh, Dong-Ru A1 Chou, Tsung-Te A1 Kei, Chi-Chung A1 Huang, Huai-Ying A1 Lin, Yu-Ming A1 Tseng, Yuan-Chieh A1 Chao, Tien-Sheng A1 Chang, Edward Yi A1 Toprasertpong, Kasidit A1 Takagi, Shinichi A1 Lin, Chun-Hsiung PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0018-9383 SN 1557-9646 JF IEEE Transactions on Electron Devices VO 71 IS 6 SP 3671 OP 3677 LK http://dx.doi.org/https://doi.org/10.1109/ted.2024.3385395 DO https://doi.org/10.1109/ted.2024.3385395 SF ELIB - SuUB Bremen
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