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1 Ergebnisse
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On-Wafer FinFET-Based 3-D E-Beam Detector Cube for In Situ ..:
Teng, Yu-Jie
;
Chao, Ho-Ting
;
Chang, Wei
...
IEEE Transactions on Electron Devices. 71 (2024) 6 - p. 3739-3745 , 2024
Link:
https://doi.org/10.1109/ted.2024.3392171
RT Journal T1 <Title>On-Wafer FinFET-Based 3-D E-Beam Detector Cube for In Situ Monitoring of Advanced Lithography Processes Beyond 5 nm</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_ted.2024.3392171&Exemplar=1&LAN=DE A1 Teng, Yu-Jie A1 Chao, Ho-Ting A1 Chang, Wei A1 Jeng Lin, Burn A1 Chih, Yue-Der A1 Chang, Jonathan A1 Jung Lin, Chrong A1 King, Ya-Chin PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0018-9383 SN 1557-9646 JF IEEE Transactions on Electron Devices VO 71 IS 6 SP 3739 OP 3745 LK http://dx.doi.org/https://doi.org/10.1109/ted.2024.3392171 DO https://doi.org/10.1109/ted.2024.3392171 SF ELIB - SuUB Bremen
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