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1 Ergebnisse
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AFM Tip Localization and Efficient Scanning Method for MEMS..:
Chen, Huang-Chih
;
Liu, Yi-Lin
;
Huang, Ching-Chi
.
IEEE Transactions on Instrumentation and Measurement. 71 (2022) - p. 1-12 , 2022
Link:
https://doi.org/10.1109/tim.2022.3175250
RT Journal T1 <Title>AFM Tip Localization and Efficient Scanning Method for MEMS Inspection</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tim.2022.3175250&Exemplar=1&LAN=DE A1 Chen, Huang-Chih A1 Liu, Yi-Lin A1 Huang, Ching-Chi A1 Fu, Li-Chen PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 0018-9456 SN 1557-9662 JF IEEE Transactions on Instrumentation and Measurement VO 71 SP 1 OP 12 LK http://dx.doi.org/https://doi.org/10.1109/tim.2022.3175250 DO https://doi.org/10.1109/tim.2022.3175250 SF ELIB - SuUB Bremen
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