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1 Ergebnisse
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Data-Driven Virtual Metrology and Retraining Systems for Co..:
Jen, Chih-Hung
;
Fan, Shu-Kai S.
;
Lin, Yu-Yu
IEEE Transactions on Instrumentation and Measurement. 71 (2022) - p. 1-12 , 2022
Link:
https://doi.org/10.1109/tim.2022.3207807
RT Journal T1 <Title>Data-Driven Virtual Metrology and Retraining Systems for Color Filter Processes of TFT-LCD Manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tim.2022.3207807&Exemplar=1&LAN=DE A1 Jen, Chih-Hung A1 Fan, Shu-Kai S. A1 Lin, Yu-Yu PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 0018-9456 SN 1557-9662 JF IEEE Transactions on Instrumentation and Measurement VO 71 SP 1 OP 12 LK http://dx.doi.org/https://doi.org/10.1109/tim.2022.3207807 DO https://doi.org/10.1109/tim.2022.3207807 SF ELIB - SuUB Bremen
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