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1 Ergebnisse
1
Noncontact Subnanometer Resolution Displacement Sensing Wit..:
Zhai, Shenghang
;
Shi, Jialin
;
Yu, Peng
...
IEEE Transactions on Instrumentation and Measurement. 72 (2023) - p. 1-11 , 2023
Link:
https://doi.org/10.1109/tim.2023.3314817
RT Journal T1 <Title>Noncontact Subnanometer Resolution Displacement Sensing With Wide Bandwidth Based on Squeeze Film Damping Effect</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tim.2023.3314817&Exemplar=1&LAN=DE A1 Zhai, Shenghang A1 Shi, Jialin A1 Yu, Peng A1 Yang, Tie A1 Yang, Yang A1 Su, Chanmin A1 Liu, Lianqing PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 0018-9456 SN 1557-9662 JF IEEE Transactions on Instrumentation and Measurement VO 72 SP 1 OP 11 LK http://dx.doi.org/https://doi.org/10.1109/tim.2023.3314817 DO https://doi.org/10.1109/tim.2023.3314817 SF ELIB - SuUB Bremen
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