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1 Ergebnisse
1
Monolithically Integrated Bidirectional Flow Sensor and Sta..:
Xu, Wei
;
Hong, Linze
;
Pan, Xiaofang
.
IEEE Transactions on Instrumentation and Measurement. 73 (2024) - p. 1-9 , 2024
Link:
https://doi.org/10.1109/tim.2024.3351251
RT Journal T1
Monolithically Integrated Bidirectional Flow Sensor and Stacked Temperature/Humidity Sensor Based on CMOS-Compatible MEMS Technology
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tim.2024.3351251&Exemplar=1&LAN=DE A1 Xu, Wei A1 Hong, Linze A1 Pan, Xiaofang A1 Izhar PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0018-9456 SN 1557-9662 JF IEEE Transactions on Instrumentation and Measurement VO 73 SP 1 OP 9 LK http://dx.doi.org/https://doi.org/10.1109/tim.2024.3351251 DO https://doi.org/10.1109/tim.2024.3351251 SF ELIB - SuUB Bremen
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