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1 Ergebnisse
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Ultralarge-Area Stitchless Scanning Probe Lithography and I..:
Liu, Yijie
;
Li, Xuexuan
;
Ge, Lin
.
IEEE/ASME Transactions on Mechatronics. 29 (2024) 2 - p. 924-935 , 2024
Link:
https://doi.org/10.1109/tmech.2023.3323385
RT Journal T1 <Title>Ultralarge-Area Stitchless Scanning Probe Lithography and In Situ Characterization System Using a Compliant Nanomanipulator</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tmech.2023.3323385&Exemplar=1&LAN=DE A1 Liu, Yijie A1 Li, Xuexuan A1 Ge, Lin A1 Zhang, Zhen PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 1083-4435 SN 1941-014X JF IEEE/ASME Transactions on Mechatronics VO 29 IS 2 SP 924 OP 935 LK http://dx.doi.org/https://doi.org/10.1109/tmech.2023.3323385 DO https://doi.org/10.1109/tmech.2023.3323385 SF ELIB - SuUB Bremen
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