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1 Ergebnisse
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Impedance Characteristic Analysis and Preliminary Experimen..:
Yang, Puqiong
;
Liu, Bo
;
Jiang, Caichao
...
IEEE Transactions on Plasma Science. 50 (2022) 4 - p. 775-781 , 2022
Link:
https://doi.org/10.1109/tps.2022.3154397
RT Journal T1 <Title>Impedance Characteristic Analysis and Preliminary Experimental Results of a High-Power RF Plasma Source</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tps.2022.3154397&Exemplar=1&LAN=DE A1 Yang, Puqiong A1 Liu, Bo A1 Jiang, Caichao A1 Yang, Xin A1 Wei, Jianglong A1 Xie, Yahong A1 Xu, Yongjian A1 Liang, Lizhen A1 Zhao, Yuanzhe A1 Xie, Yuanlai A1 Wang, Jinxin A1 Hu, Chundong PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 0093-3813 SN 1939-9375 JF IEEE Transactions on Plasma Science VO 50 IS 4 SP 775 OP 781 LK http://dx.doi.org/https://doi.org/10.1109/tps.2022.3154397 DO https://doi.org/10.1109/tps.2022.3154397 SF ELIB - SuUB Bremen
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