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1 Ergebnisse
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A Modified Lasso Model for Yield Analysis Considering the I..:
Heo, Taewon
;
Kim, Youngju
;
Kim, Chang Ouk
IEEE Transactions on Semiconductor Manufacturing. 35 (2022) 1 - p. 32-39 , 2022
Link:
https://doi.org/10.1109/tsm.2021.3121026
RT Journal T1 <Title>A Modified Lasso Model for Yield Analysis Considering the Interaction Effect in a Multistage Manufacturing Line</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tsm.2021.3121026&Exemplar=1&LAN=DE A1 Heo, Taewon A1 Kim, Youngju A1 Kim, Chang Ouk PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 0894-6507 SN 1558-2345 JF IEEE Transactions on Semiconductor Manufacturing VO 35 IS 1 SP 32 OP 39 LK http://dx.doi.org/https://doi.org/10.1109/tsm.2021.3121026 DO https://doi.org/10.1109/tsm.2021.3121026 SF ELIB - SuUB Bremen
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