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1 Ergebnisse
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Precise Pattern Alignment for Die-to-Database Inspection Ba..:
Nam, Yunhyoung
;
Joo, Sungho
;
Kwak, Nohong
..
IEEE Transactions on Semiconductor Manufacturing. 35 (2022) 3 - p. 532-539 , 2022
Link:
https://doi.org/10.1109/tsm.2022.3171788
RT Journal T1 <Title>Precise Pattern Alignment for Die-to-Database Inspection Based on the Generative Adversarial Network</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tsm.2022.3171788&Exemplar=1&LAN=DE A1 Nam, Yunhyoung A1 Joo, Sungho A1 Kwak, Nohong A1 Kim, Kihyun A1 Kim, Do-Nyun PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 0894-6507 SN 1558-2345 JF IEEE Transactions on Semiconductor Manufacturing VO 35 IS 3 SP 532 OP 539 LK http://dx.doi.org/https://doi.org/10.1109/tsm.2022.3171788 DO https://doi.org/10.1109/tsm.2022.3171788 SF ELIB - SuUB Bremen
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