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1 Ergebnisse
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Streamlining Semiconductor Manufacturing of 200 mm and 300 ..:
Flechsig, Christian
;
Lohmer, Jacob
;
Lasch, Rainer
...
IEEE Transactions on Semiconductor Manufacturing. 35 (2022) 3 - p. 397-404 , 2022
Link:
https://doi.org/10.1109/tsm.2022.3184041
RT Journal T1
Streamlining Semiconductor Manufacturing of 200 mm and 300 mm Wafers: A Longitudinal Case Study on the Lot-to-Order-Matching Process
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tsm.2022.3184041&Exemplar=1&LAN=DE A1 Flechsig, Christian A1 Lohmer, Jacob A1 Lasch, Rainer A1 Zettler, Benjamin A1 Schneider, Germar A1 Eberts, Dietrich PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 0894-6507 SN 1558-2345 JF IEEE Transactions on Semiconductor Manufacturing VO 35 IS 3 SP 397 OP 404 LK http://dx.doi.org/https://doi.org/10.1109/tsm.2022.3184041 DO https://doi.org/10.1109/tsm.2022.3184041 SF ELIB - SuUB Bremen
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