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1 Ergebnisse
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Perspectives on Black Silicon in Semiconductor Manufacturin..:
Liu, Xiaolong
;
Radfar, Behrad
;
Chen, Kexun
...
IEEE Transactions on Semiconductor Manufacturing. 35 (2022) 3 - p. 504-510 , 2022
Link:
https://doi.org/10.1109/tsm.2022.3190630
RT Journal T1
Perspectives on Black Silicon in Semiconductor Manufacturing: Experimental Comparison of Plasma Etching, MACE, and Fs-Laser Etching
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tsm.2022.3190630&Exemplar=1&LAN=DE A1 Liu, Xiaolong A1 Radfar, Behrad A1 Chen, Kexun A1 Setala, Olli E. A1 Pasanen, Toni P. A1 Yli-Koski, Marko A1 Savin, Hele A1 Vahanissi, Ville PB Institute of Electrical and Electronics Engineers (IEEE) YR 2022 SN 0894-6507 SN 1558-2345 JF IEEE Transactions on Semiconductor Manufacturing VO 35 IS 3 SP 504 OP 510 LK http://dx.doi.org/https://doi.org/10.1109/tsm.2022.3190630 DO https://doi.org/10.1109/tsm.2022.3190630 SF ELIB - SuUB Bremen
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