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Machine Learning-Based Edge Placement Error Analysis and Op..:

Ngo, Anh Tuan ; Dey, Bappaditya ; Halder, Sandip..
IEEE Transactions on Semiconductor Manufacturing.  36 (2023)  1 - p. 1-13 , 2023
Link: https://doi.org/10.1109/tsm.2022.3217326