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The Environmental Footprint of IC Production: Review, Analy..:

Pirson, Thibault ; Delhaye, Thibault P. ; Pip, Alex G....
IEEE Transactions on Semiconductor Manufacturing.  36 (2023)  1 - p. 56-67 , 2023
Link: https://doi.org/10.1109/tsm.2022.3228311