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1 Ergebnisse
1
An Emerging Local Annealing Method for Simultaneous Crystal..:
Fan, Dongyu
;
Xia, Zhiliang
;
Yang, Tao
...
IEEE Transactions on Semiconductor Manufacturing. 36 (2023) 1 - p. 139-143 , 2023
Link:
https://doi.org/10.1109/tsm.2022.3229471
RT Journal T1 <Title>An Emerging Local Annealing Method for Simultaneous Crystallization and Activation in Xtacking 3-D NAND Flash</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tsm.2022.3229471&Exemplar=1&LAN=DE A1 Fan, Dongyu A1 Xia, Zhiliang A1 Yang, Tao A1 Yang, Yuancheng A1 Wu, Linchun A1 Zhang, Kun A1 Liu, Lei A1 Chen, Xi A1 Yan, Yuan A1 Zhou, Wenxi A1 Huo, Zongliang PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 0894-6507 SN 1558-2345 JF IEEE Transactions on Semiconductor Manufacturing VO 36 IS 1 SP 139 OP 143 LK http://dx.doi.org/https://doi.org/10.1109/tsm.2022.3229471 DO https://doi.org/10.1109/tsm.2022.3229471 SF ELIB - SuUB Bremen
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