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1 Ergebnisse
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Iterative Learning-Based Predictive Control Method for Elec..:
Wan, Yin
;
Liu, Ding
;
Ren, Jun-Chao
IEEE Transactions on Semiconductor Manufacturing. 36 (2023) 2 - p. 239-250 , 2023
Link:
https://doi.org/10.1109/tsm.2023.3266220
RT Journal T1 <Title>Iterative Learning-Based Predictive Control Method for Electronic Grade Silicon Single Crystal Batch Process</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tsm.2023.3266220&Exemplar=1&LAN=DE A1 Wan, Yin A1 Liu, Ding A1 Ren, Jun-Chao PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 0894-6507 SN 1558-2345 JF IEEE Transactions on Semiconductor Manufacturing VO 36 IS 2 SP 239 OP 250 LK http://dx.doi.org/https://doi.org/10.1109/tsm.2023.3266220 DO https://doi.org/10.1109/tsm.2023.3266220 SF ELIB - SuUB Bremen
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