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1 Ergebnisse
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Analysis of Image Hashing in Wafer Map Failure Pattern Reco..:
Piao, Minghao
;
Jin, Cheng Hao
IEEE Transactions on Semiconductor Manufacturing. 36 (2023) 3 - p. 378-388 , 2023
Link:
https://doi.org/10.1109/tsm.2023.3273810
RT Journal T1 <Title>Analysis of Image Hashing in Wafer Map Failure Pattern Recognition</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tsm.2023.3273810&Exemplar=1&LAN=DE A1 Piao, Minghao A1 Jin, Cheng Hao PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 0894-6507 SN 1558-2345 JF IEEE Transactions on Semiconductor Manufacturing VO 36 IS 3 SP 378 OP 388 LK http://dx.doi.org/https://doi.org/10.1109/tsm.2023.3273810 DO https://doi.org/10.1109/tsm.2023.3273810 SF ELIB - SuUB Bremen
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