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1 Ergebnisse
1
Advanced Process Control System for Trench Shape of Power D..:
Ito, Takumi
;
Xueting, Wang
;
Oomuro, Yasuhisa
.
IEEE Transactions on Semiconductor Manufacturing. 36 (2023) 4 - p. 501-505 , 2023
Link:
https://doi.org/10.1109/tsm.2023.3285867
RT Journal T1 <Title>Advanced Process Control System for Trench Shape of Power Devices</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tsm.2023.3285867&Exemplar=1&LAN=DE A1 Ito, Takumi A1 Xueting, Wang A1 Oomuro, Yasuhisa A1 Nagashima, Kazutaka PB Institute of Electrical and Electronics Engineers (IEEE) YR 2023 SN 0894-6507 SN 1558-2345 JF IEEE Transactions on Semiconductor Manufacturing VO 36 IS 4 SP 501 OP 505 LK http://dx.doi.org/https://doi.org/10.1109/tsm.2023.3285867 DO https://doi.org/10.1109/tsm.2023.3285867 SF ELIB - SuUB Bremen
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