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Gas-Delivery Fluid-Mechanical Timescales in Semiconductor M..:
Gonzalez-Juez, E.
IEEE Transactions on Semiconductor Manufacturing. 37 (2024) 1 - p. 38-45 , 2024
Link:
https://doi.org/10.1109/tsm.2023.3327067
RT Journal T1 <Title>Gas-Delivery Fluid-Mechanical Timescales in Semiconductor Manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tsm.2023.3327067&Exemplar=1&LAN=DE A1 Gonzalez-Juez, E. PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0894-6507 SN 1558-2345 JF IEEE Transactions on Semiconductor Manufacturing VO 37 IS 1 SP 38 OP 45 LK http://dx.doi.org/https://doi.org/10.1109/tsm.2023.3327067 DO https://doi.org/10.1109/tsm.2023.3327067 SF ELIB - SuUB Bremen
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