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1 Ergebnisse
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Fabrication of the Highly Ordered Silicon Nanocone Array Wi..:
Pan, Aixi
;
Zhu, Chenxu
;
Yan, Zheng
...
IEEE Transactions on Semiconductor Manufacturing. 37 (2024) 2 - p. 160-165 , 2024
Link:
https://doi.org/10.1109/tsm.2024.3372521
RT Journal T1 <Title>Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tsm.2024.3372521&Exemplar=1&LAN=DE A1 Pan, Aixi A1 Zhu, Chenxu A1 Yan, Zheng A1 Zhu, Xiaoli A1 Liu, Zhongyi A1 Cui, Bo PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0894-6507 SN 1558-2345 JF IEEE Transactions on Semiconductor Manufacturing VO 37 IS 2 SP 160 OP 165 LK http://dx.doi.org/https://doi.org/10.1109/tsm.2024.3372521 DO https://doi.org/10.1109/tsm.2024.3372521 SF ELIB - SuUB Bremen
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