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1 Ergebnisse
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Pioneering Fast and Safe Low-k Silicon Dioxide Synthesis fo..:
Chow, Yu-Ting
;
Chao, Shou-Yen
;
Jiang, Pei-Cheng
...
IEEE Transactions on Semiconductor Manufacturing. 37 (2024) 2 - p. 185-189 , 2024
Link:
https://doi.org/10.1109/tsm.2024.3374067
RT Journal T1 <Title>Pioneering Fast and Safe Low-k Silicon Dioxide Synthesis for Modern Integrated Circuits</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tsm.2024.3374067&Exemplar=1&LAN=DE A1 Chow, Yu-Ting A1 Chao, Shou-Yen A1 Jiang, Pei-Cheng A1 Chang, Chung-Tzu A1 Zheng, Mei-Yuan A1 Wang, Mu-Chun A1 Chang, Cheng-Hsun-Tony A1 Lin, Chii-Ruey A1 Chen, Chia-Fu A1 Liu, Kuo-Wei PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0894-6507 SN 1558-2345 JF IEEE Transactions on Semiconductor Manufacturing VO 37 IS 2 SP 185 OP 189 LK http://dx.doi.org/https://doi.org/10.1109/tsm.2024.3374067 DO https://doi.org/10.1109/tsm.2024.3374067 SF ELIB - SuUB Bremen
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