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1 Ergebnisse
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3-D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measu..:
Wang, Youcheng
;
Chen, Zhuo
;
Wang, Cong
...
IEEE Transactions on Semiconductor Manufacturing. 37 (2024) 3 - p. 244-250 , 2024
Link:
https://doi.org/10.1109/tsm.2024.3404475
RT Journal T1 <Title>3-D NAND Oxide/Nitride Tier Stack Thickness and Zonal Measurements With Infrared Metrology</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tsm.2024.3404475&Exemplar=1&LAN=DE A1 Wang, Youcheng A1 Chen, Zhuo A1 Wang, Cong A1 Keller, Nick A1 Andrew Antonelli, G. A1 Liu, Zhuan A1 Ribaudo, Troy A1 Grynko, Rostislav PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0894-6507 SN 1558-2345 JF IEEE Transactions on Semiconductor Manufacturing VO 37 IS 3 SP 244 OP 250 LK http://dx.doi.org/https://doi.org/10.1109/tsm.2024.3404475 DO https://doi.org/10.1109/tsm.2024.3404475 SF ELIB - SuUB Bremen
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