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1 Ergebnisse
1
Modeling the Energy Consumption of Integrated Circuit fab I..:
Liu, I.-Y.
;
Winckel, L. Van
;
Boakes, L.
...
IEEE Transactions on Semiconductor Manufacturing. , 2024
Link:
https://doi.org/10.1109/tsm.2024.3408926
RT Journal T1
Modeling the Energy Consumption of Integrated Circuit fab Infrastructure
UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tsm.2024.3408926&Exemplar=1&LAN=DE A1 Liu, I.-Y. A1 Winckel, L. Van A1 Boakes, L. A1 Bardon, M. Garcia A1 Rolin, C. A1 Ragnarsson, L.-Å. PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0894-6507 SN 1558-2345 JF IEEE Transactions on Semiconductor Manufacturing SP 1 OP 1 LK http://dx.doi.org/https://doi.org/10.1109/tsm.2024.3408926 DO https://doi.org/10.1109/tsm.2024.3408926 SF ELIB - SuUB Bremen
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