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1 Ergebnisse
1
DSH to Extend-DSH: Chip-Level Chemical Mechanical Planariza..:
Yue, Qian
;
Lan, Chen
IEEE Transactions on Semiconductor Manufacturing. 37 (2024) 3 - p. 329-339 , 2024
Link:
https://doi.org/10.1109/tsm.2024.3418827
RT Journal T1 <Title>DSH to Extend-DSH: Chip-Level Chemical Mechanical Planarization (CMP) Model Upgrade Based on Decoupling Regression Strategy</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1109_tsm.2024.3418827&Exemplar=1&LAN=DE A1 Yue, Qian A1 Lan, Chen PB Institute of Electrical and Electronics Engineers (IEEE) YR 2024 SN 0894-6507 SN 1558-2345 JF IEEE Transactions on Semiconductor Manufacturing VO 37 IS 3 SP 329 OP 339 LK http://dx.doi.org/https://doi.org/10.1109/tsm.2024.3418827 DO https://doi.org/10.1109/tsm.2024.3418827 SF ELIB - SuUB Bremen
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