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3-D-TCAD-Based Parasitic Capacitance Extraction for Emergin..:

Bhoj, Ajay N. ; Joshi, Rajiv V. ; Jha, Niraj K.
IEEE Transactions on Very Large Scale Integration (VLSI) Systems.  21 (2013)  11 - p. 2094-2105 , 2013
Link: https://doi.org/10.1109/tvlsi.2012.2227848