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Triple Patterning Lithography Aware Optimization and Detail..:

Kuang, Jian ; Chow, Wing-Kai ; Young, Evangeline F. Y.
IEEE Transactions on Very Large Scale Integration (VLSI) Systems.  24 (2016)  4 - p. 1319-1332 , 2016
Link: https://doi.org/10.1109/tvlsi.2015.2461463