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Amorphous Mo–N and Mo–Si–N films in microelectromechanical ..:
KATTELUS, H.
;
YLÖNEN, M.
;
BLOMBERG, M.
Fatigue & Fracture of Engineering Materials & Structures. 28 (2005) 8 - p. 743-749 , 2005
Link:
https://doi.org/10.1111/j.1460-2695.2005.00887.x
RT Journal T1 <Title>Amorphous Mo–N and Mo–Si–N films in microelectromechanical systems</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1111_j.1460-2695.2005.00887.x&Exemplar=1&LAN=DE A1 KATTELUS, H. A1 YLÖNEN, M. A1 BLOMBERG, M. PB Wiley YR 2005 SN 8756-758X SN 1460-2695 JF Fatigue & Fracture of Engineering Materials & Structures VO 28 IS 8 SP 743 OP 749 LK http://dx.doi.org/https://doi.org/10.1111/j.1460-2695.2005.00887.x DO https://doi.org/10.1111/j.1460-2695.2005.00887.x SF ELIB - SuUB Bremen
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