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Erosion behavior of Y2O3 in fluorine‐based etching plasmas:..:
Kindelmann, Moritz
;
Stamminger, Mark
;
Schön, Nino
...
Journal of the American Ceramic Society. 104 (2020) 3 - p. 1465-1474 , 2020
Link:
https://doi.org/10.1111/jace.17556
RT Journal T1 <Title>Erosion behavior of Y2O3 in fluorine‐based etching plasmas: Orientation dependency and reaction layer formation</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1111_jace.17556&Exemplar=1&LAN=DE A1 Kindelmann, Moritz A1 Stamminger, Mark A1 Schön, Nino A1 Rasinski, Marcin A1 Eichel, Rüdiger‐A. A1 Hausen, Florian A1 Bram, Martin A1 Guillon, Olivier PB Wiley YR 2020 SN 0002-7820 SN 1551-2916 JF Journal of the American Ceramic Society VO 104 IS 3 SP 1465 OP 1474 LK http://dx.doi.org/https://doi.org/10.1111/jace.17556 DO https://doi.org/10.1111/jace.17556 SF ELIB - SuUB Bremen
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