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Review Article: Recommended reading list of early publicati..:

Ahvenniemi, Esko ; Akbashev, Andrew R. ; Ali, Saima...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 35 (2017) 1 - p. 010801 , 2017

Link: https://doi.org/10.1116/1.4971389

RT Journal
T1 <Title>Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the "Virtual Project on the History of ALD"</Title>

UL https://suche.suub.uni-bremen.de/peid=cr-10.1116_1.4971389&Exemplar=1&LAN=DE
				
A1 Ahvenniemi, Esko
A1 Akbashev, Andrew R.
A1 Ali, Saima
A1 Bechelany, Mikhael
A1 Berdova, Maria
A1 Boyadjiev, Stefan
A1 Cameron, David C.
A1 Chen, Rong
A1 Chubarov, Mikhail
A1 Cremers, Veronique
A1 Devi, Anjana
A1 Drozd, Viktor
A1 Elnikova, Liliya
A1 Gottardi, Gloria
A1 Grigoras, Kestutis
A1 Hausmann, Dennis M.
A1 Hwang, Cheol Seong
A1 Jen, Shih-Hui
A1 Kallio, Tanja
A1 Kanervo, Jaana
A1 Khmelnitskiy, Ivan
A1 Kim, Do Han
A1 Klibanov, Lev
A1 Koshtyal, Yury
A1 Krause, A. Outi I.
A1 Kuhs, Jakob
A1 Kärkkänen, Irina
A1 Kääriäinen, Marja-Leena
A1 Kääriäinen, Tommi
A1 Lamagna, Luca
PB American Vacuum Society
YR 2017
SN 0734-2101
SN 1520-8559
JF Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
VO 35
IS 1
SP 010801
LK http://dx.doi.org/https://doi.org/10.1116/1.4971389
DO https://doi.org/10.1116/1.4971389
SF ELIB - SuUB Bremen

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