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1 Ergebnisse
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Growth and Characterization of Fluorocarbon Thin Films from..:
Jia-Cih Jhuang
;
Hung, Yu-Liang
;
Huang, Chun
High Energy Chemistry. 58 (2024) 1 - p. 158-165 , 2024
Link:
https://doi.org/10.1134/s0018143924010089
RT Journal T1
Growth and Characterization of Fluorocarbon Thin Films from Low Pressure Tetrafluoromethane, Hexafluoroethane and Octafluorocyclobutane Plasmas
UL https://suche.suub.uni-bremen.de/peid=cr-10.1134_s0018143924010089&Exemplar=1&LAN=DE A1 Jia-Cih Jhuang A1 Hung, Yu-Liang A1 Huang, Chun PB Pleiades Publishing Ltd YR 2024 SN 0018-1439 SN 1608-3148 JF High Energy Chemistry VO 58 IS 1 SP 158 OP 165 LK http://dx.doi.org/https://doi.org/10.1134/s0018143924010089 DO https://doi.org/10.1134/s0018143924010089 SF ELIB - SuUB Bremen
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