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A Discharge Cell that Combines a Magnetron and a Hollow Cat..:
Rogov, A. V.
;
Kapustin, Yu. V.
Instruments and Experimental Techniques. 61 (2018) 2 - p. 317-322 , 2018
Link:
https://doi.org/10.1134/s0020441218020069
RT Journal T1 <Title>A Discharge Cell that Combines a Magnetron and a Hollow Cathode for Cleaning Substrates and Subsequent Deposition of Coatings</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1134_s0020441218020069&Exemplar=1&LAN=DE A1 Rogov, A. V. A1 Kapustin, Yu. V. PB Pleiades Publishing Ltd YR 2018 SN 0020-4412 SN 1608-3180 JF Instruments and Experimental Techniques VO 61 IS 2 SP 317 OP 322 LK http://dx.doi.org/https://doi.org/10.1134/s0020441218020069 DO https://doi.org/10.1134/s0020441218020069 SF ELIB - SuUB Bremen
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