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1 Ergebnisse
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Acceleration complex for extreme ultraviolet nanolithograph..:
Syresin, E. M.
;
Anchutkin, V. S.
;
Budagov, Yu. A.
...
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 5 (2011) 3 - p. 520-525 , 2011
Link:
https://doi.org/10.1134/s1027451011060206
RT Journal T1 <Title>Acceleration complex for extreme ultraviolet nanolithography based on a free-electron laser with kilowatt-scale average radiation power</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1134_s1027451011060206&Exemplar=1&LAN=DE A1 Syresin, E. M. A1 Anchutkin, V. S. A1 Budagov, Yu. A. A1 Bel'skii, A. B. A1 Gushchin, O. P. A1 Lenskii, I. F. A1 Ol'shevskii, A. G. A1 Sisakyan, A. N. A1 Trubnikov, G. V. A1 Shelepin, N. A. A1 Shirkov, G. D. A1 Yurkov, M. V. PB Pleiades Publishing Ltd YR 2011 SN 1027-4510 SN 1819-7094 JF Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques VO 5 IS 3 SP 520 OP 525 LK http://dx.doi.org/https://doi.org/10.1134/s1027451011060206 DO https://doi.org/10.1134/s1027451011060206 SF ELIB - SuUB Bremen
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