I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Reflective mask for projection lithography operating at a w..:
Gusev, S. A.
;
Zuev, S. Yu.
;
Klimov, A. Yu.
...
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 6 (2012) 4 - p. 568-573 , 2012
Link:
https://doi.org/10.1134/s1027451012070075
RT Journal T1 <Title>Reflective mask for projection lithography operating at a wavelength of 13.5 nm</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1134_s1027451012070075&Exemplar=1&LAN=DE A1 Gusev, S. A. A1 Zuev, S. Yu. A1 Klimov, A. Yu. A1 Pestov, A. E. A1 Polkovnikov, V. N. A1 Rogov, V. V. A1 Salashchenko, N. N. A1 Skorokhodov, E. V. A1 Toropov, M. N. A1 Chkhalo, N. I. PB Pleiades Publishing Ltd YR 2012 SN 1027-4510 SN 1819-7094 JF Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques VO 6 IS 4 SP 568 OP 573 LK http://dx.doi.org/https://doi.org/10.1134/s1027451012070075 DO https://doi.org/10.1134/s1027451012070075 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
